Start by checking the connections to the EGR valve, if either the vacuum pipe of electrical connection are damaged / corroded then the EGR can be on all time which certainly will hurt performance. Its also possible that its a fault with the EGR valve so its worth removing the valve and cleaning it out with brake cleaner, if it looks particularly clogged then replace it.
and if this is OK then this could be an airleak after the airflow meter, any air dragged in here isn't 'seen' by the ECU and so not compensated for and can lean the engine out and can also allow the engine to rev up when not desired causing rough running.
As its a mechanical fault it tends not to turn on the fault light and you can sometimes hear a 'hissing' noise with the engine running.
Check the hose clips for tightness and inspect the trunking for any cracks or splits and also all the vacuum system, the small bore pipes and fittings for cracks and missing parts.
The best way to locate a leak is to have the engine running and warm and then spray lighter gas /propane or brake cleaner around each joint in turn. If the engine rev's up you've found your leak.
Now you might think that spraying lighter gas around a hot engine isn’t wise, however the flash /ignition point of gas is about 400°C so you need a naked flame or spark to set it off and I’ve used this method for many years without incident.
Work your way through each possible joint one at a time and you should find it. I use a slightly flattened piece of brake pipe and some rubber hose from the can of lighter gas to provide a spraying 'wand' and allow a direct blast of gas into each area, especially those difficult to reach with large implements.
It’s also worth cleaning the MAF sensor wires, as they can get coated with dirt over time which then offsets the reading
Use some contact cleaner or brake cleaner to spray onto the wires to remove the dirt – on no account touch the wires with anything as they are very fragile